Fabrication and Performance Analysis of AZO and MCCO as Thin Film-Thermoelectric Generator Materials

The purpose of this research was to determine the performance AZO and MCCO materials as constituents thin film-thermoelectric generator module. method used for fabrication is DC Magnetron Sputtering. electrode material Ag substrate SiO2 glass. arrangement film thermoelectric module P-N-P-N-P-N-P-N-P-N (5 couples p-n junctions). Based on test results, thickness type N 74.72 nm P 90.34 nm. At highest temperature (300 oC), Seebeck coefficient value -108 µV/K while 350 µV/K, electrical resistivity 0.07 Ω.m 0.36 Ω.m. difference given in 1.538 °C can produce a voltage 1,842 ± 0.047 mV, 4 an efficiency 0.44%. research, it be concluded that modules will have better at temperatures around 300 - °C.